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Note: Interpolation for evaluation of a two-dimensional spatial profile of plasma densities at low gas pressures

Authors
Oh, Se-JinKim, Young-ChulChung, Chin-Wook
Issue Date
Feb-2011
Publisher
AMER INST PHYSICS
Citation
REVIEW OF SCIENTIFIC INSTRUMENTS, v.82, no.2, pp.1 - 2
Indexed
SCIE
SCOPUS
Journal Title
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume
82
Number
2
Start Page
1
End Page
2
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/169122
DOI
10.1063/1.3553008
ISSN
0034-6748
Abstract
An interpolation algorithm for the evaluation of the spatial profile of plasma densities in a cylindrical reactor was developed for low gas pressures. The algorithm is based on a collisionless two-dimensional fluid model. Contrary to the collisional case, i.e., diffusion fluid model, the fitting algorithm depends on the aspect ratio of the cylindrical reactor. The spatial density profile of the collisionless fitting algorithm is presented in two-dimensional images and compared with the results of the diffusion fluid model.
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