Electrostatic force microscopy measurements of charge trapping behavior of Au nanoparticles embedded in metal-insulator-semiconductor structure
- Authors
- Yang, JungYup; Kim, JooHyung; Lee, JunSeok; Min, SeungKi; Kim, HyunJung; Wang, Kang L.; Hong, JinPyo
- Issue Date
- Sep-2008
- Publisher
- ELSEVIER SCIENCE BV
- Keywords
- electrostatic force microscopy; nanoparticles; non-volatile memory
- Citation
- ULTRAMICROSCOPY, v.108, no.10, pp.1215 - 1219
- Indexed
- SCIE
SCOPUS
- Journal Title
- ULTRAMICROSCOPY
- Volume
- 108
- Number
- 10
- Start Page
- 1215
- End Page
- 1219
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/177959
- DOI
- 10.1016/j.ultramic.2008.04.041
- ISSN
- 0304-3991
- Abstract
- Charge trapping properties of electrons and holes in ALL nanoparticles embedded in metal-insulator-semiconductor (MIS) on p-type Si (10 0) substrates were investigated by electrostatic force microscopy (EFM). The ALL nanoparticles were prepared with a unique laser irradiation method and charged by applying a bias voltage between EFM tip and sample. The EFM system was used to image charged areas and to determine quantitatively the amount of stored charge in the ALI nanoparticle-inserted MIS structure. In addition, charge trapping characteristics of the samples were carried out with electrical measurements, such as capacitance-voltage and current-voltage measurement for memory characteristics. Finally, the comparison of EFM results with the electrically measured data was done to determine the amount of stored charge in the ALI nanoparticle-inserted MIS struCtUre, confirming the usefulness of EFM system for the characterization of nanoparticle-based non-volatile devices.
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