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Feasibility of multi-walled carbon nanotube probes in AFM anodization lithography
- Authors
- Choi, Ji Sun; Bae, Sukiong; Ahn, Sang Jung; Kim, Dal Hyun; Jung, Ki Young; Han, Cheolsu; Chung, Chung Choo; Lee, Haiwon
- Issue Date
- Oct-2007
- Publisher
- Elsevier BV
- Keywords
- AFM anodization lithography; CNT tip; threshold voltage; pulsed bias voltage
- Citation
- Ultramicroscopy, v.107, no.10-11, pp 1091 - 1094
- Pages
- 4
- Indexed
- SCIE
SCOPUS
- Journal Title
- Ultramicroscopy
- Volume
- 107
- Number
- 10-11
- Start Page
- 1091
- End Page
- 1094
- ISSN
- 0304-3991
1879-2723
- Abstract
- Multi-walled carbon nanotube (CNT) tips were used in atomic force microscope (AFM) anodization lithography to investigate their advantages over conventional tips. The CNT tip required a larger threshold voltage than the mother silicon tip due to the Schottky barrier at the CNT-Si interface. Current-to-voltage curves distinguished the junction property between CNTs and mother tips. The CNT-platinum tip, which is more conductive than the CNT-silicon tip, showed promising results for AFM anodization lithography. Finally, the nanostructures with high aspect ratio were fabricated using a pulsed bias voltage technique as well as the CNT tip.
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