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Introduction on atomic layer deposition for high-k dieletric & high mobility oxide semiconductor thin film transistors
- Authors
- 박진성
- Issue Date
- 22-May-2019
- Place
- Palace Side Hotel, Kyoto, Japan
- Conference Name
- ULSIC vs TFT: 7th International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)