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Development of high ion density and uniformity plasma source for large scale descum processing
- Authors
- 정진욱
- Issue Date
- 10-Nov-2022
- Place
- 한화리조트(부산)
- Conference Name
- The 20th international Symposium on Microelectronics and Packagin
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)