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History of atomic layer deposition and its relationship with the American Vacuum Society (vol 31, 050818, 2013)
- Authors
- Parsons, Gregory N.; Elam, Jeffrey W.; George, Steven M.; Haukka, Suvi; Jeon, Hyeongtag; (Erwin) Kessels, W. M. M.; Leskelae, Markku; Poodt, Paul; Ritala, Mikko; Rossnagel, Steven M.
- Issue Date
- May-2020
- Publisher
- A V S AMER INST PHYSICS
- Citation
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.38, no.3, pp.1 - 1
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
- Volume
- 38
- Number
- 3
- Start Page
- 1
- End Page
- 1
- ISSN
- 0734-2101
- Files in This Item
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Collections - 서울 공과대학 > 서울 신소재공학부 > 1. Journal Articles
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Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)