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Channel-Length-Dependent Low-Frequency Noise Characteristics of Ferroelectric Junctionless Poly-Si Thin-Film Transistors

Authors
Shin, WonjunKim, SangwooKoo, Ryun-HanKwon, DongseokKim, Jae-JoonKwon, Deok-HwangKwon, DaewoongLee, Jong-Ho
Issue Date
Jun-2023
Publisher
Institute of Electrical and Electronics Engineers
Keywords
channel length, 1/f noise; ferroelectric junctionless thin-film transistor (FE JL TFT); low-frequency noise (LFN)
Citation
IEEE Electron Device Letters, v.44, no.6, pp 1003 - 1006
Pages
4
Indexed
SCIE
SCOPUS
Journal Title
IEEE Electron Device Letters
Volume
44
Number
6
Start Page
1003
End Page
1006
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/193124
DOI
10.1109/LED.2023.3267134
ISSN
0741-3106
1558-0563
Abstract
In this study, we explore the low-frequency noise (LFN) characteristics of hafnium-zirconium ferroelectric junctionless poly-Si thin-film transistors (FE JL TFTs) with different channel lengths (<italic>L</italic>s). The findings reveal that the magnitude of 1/<italic>f</italic> noise decreases with a decrease in <italic>L</italic>, exhibiting the opposite trend from that of conventional FETs. Additionally, it is observed that the protrusion of poly-Si is more susceptible to damage from tensile stress during post-metal annealing in devices with longer L.
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