Electron temperature and ion density distribution on a vertical section in a weakly magnetized inductively coupled plasma

Abstract

In this study, the distributions of electron temperature and ion density on a vertical section in a weakly magnetized inductively coupled plasma were measured using radially movable floating probes placed at different axial positions. The chamber used in this experiment included two cylindrical parts: a smaller radius top part with a planar antenna on the top quartz window and a larger radius downstream part. A magnet coil around the chamber top part maintained a divergent magnetic field in the discharge region. As the current in the magnet coil increased, the magnetic field also increased. Due to the variations of the radio frequency electric field in the plasma, the increase in electron temperature can be divided into different stages. At the higher magnetic field, the electric field of the electrostatic wave can increase electron temperature at the chamber center axial. Also, since the electron cyclotron resonance (ECR) heating in the chamber downstream part changed with the magnetic field, the maximum ion density was observed when the magnetic field around the bias electrode was slightly larger than the ECR magnetic condition. The reasons for these variations were verified in the plasma numerical simulations. The ion flux distribution measured on the bias electrode can change from a center-high distribution to an M-shape distribution with the increased magnetic field.