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극저온 전자 온도 플라즈마에서 고 종횡비 trench 구조의 Charging 전압 측정에 대한 실험적 연구
- Authors
- 정진욱
- Issue Date
- 22-Aug-2023
- Place
- 신화월드(제주)
- Conference Name
- 제65회 한국진공학회
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)