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차세대 디바이스를 위한 자기조립 단층을 이용한 코발트 금속층의 선택적 영역 원자층 증착

Authors
최창환
Issue Date
27-Apr-2023
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/199951
Place
제주국제컨벤션센터(ICC JEJU)
Conference Name
대한금속재료학회 춘계학술대회
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Choi, Chang hwan
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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