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회귀 합성곱 신경망 기반의 테라헤르츠 신호 학습을 통한 반도체 플라즈마 공정 조건 모니터링 기술 개발
- Authors
- 김학성
- Issue Date
- 25-May-2023
- Place
- 부산항국제전시컨벤션센터(BPEX)
- Conference Name
- 2023년 한국비파괴검사학회 춘계학술대회
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Collections - 서울 공과대학 > 서울 기계공학부 > 2. Conference Papers
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Related Researcher
- Kim, Hak Sung
- COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)