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Synthesis of Superior-Performance InGaZnO Based on Ideal Reaction of Plasma Enhanced Atomic Layer Deposition

Authors
박진성
Issue Date
25-May-2023
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/200472
Place
Los angeles
Conference Name
Society for Information Display 2023
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Park, Jinseong
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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