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DRIE 기반 선 식각 패턴 형성을 통한 EUV 펠리클 plateau 현상 개선 연구
- Authors
- 안진호
- Issue Date
- 11-Aug-2025
- Place
- 수원컨벤션센터
- Conference Name
- 2025 차세대 리소그래피 학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)