Effects of the radio-frequency sputtering power of an MgO tunneling barrier on the tunneling magneto-resistance ratio for Co2Fe6B2/MgO-based perpendicular-magnetic tunnel junctions
- Authors
- Lee, Du-Yeong; Seo, Hyung-Tak; Park, Jea-Gun
- Issue Date
- Nov-2016
- Publisher
- ROYAL SOC CHEMISTRY
- Citation
- JOURNAL OF MATERIALS CHEMISTRY C, v.4, no.1, pp.135 - 141
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF MATERIALS CHEMISTRY C
- Volume
- 4
- Number
- 1
- Start Page
- 135
- End Page
- 141
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/21405
- DOI
- 10.1039/c5tc03669k
- ISSN
- 2050-7526
- Abstract
- For Co2Fe6B2-MgO based p-MTJ spin valves with [Co/Pt](n)-SyAF layers ex situ annealed at 350 degrees C and 30 kOe for 30 min, the tunneling magneto-resistance (TMR) ratio strongly depended on the radio-frequency (RF) sputtering power in a 0.65-1.15 nm thick MgO tunneling barrier, achieving a TMR ratio of 168% at 300 W. The TMR ratio rapidly and linearly increased with a decrease in the RF sputtering power between 300 and 500 W and then abruptly decreased at 250 W since the face-centered-cubic crystallinity of the tunneling barrier improved with a decrease in the RF sputtering power between 300 and 500 W and then abruptly degraded at 250 W. Optical properties measured by spectroscopic ellipsometry, such as the defect state density and energy band gap of a similar to 1.0 nm thick tunneling barrier layer, indicate that the RF sputtering power needed to obtain a larger poly grain size for the barrier tends to enhance the barrier's face-centered-cubic crystallinity.
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