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2. Conference Papers(서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers)4,848

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Collection's Items (Sorted by Submit Date in Descending order): 1221 to 1240 of 4848

Micro structural properties of ZrSi2 thin films on Si substrates

전형탁

ConferenceIssue Date1996
The effect of remote H-plasma treatmenton the transition metal impurities contaminted on the Si substrate

전형탁

ConferenceIssue Date1996
Formation and behavior of ZrSi2 on different silicon surface structures

전형탁

ConferenceIssue Date1996
텅스텐 스퍼터링시 박막의 응력 조절

안진호

ConferenceIssue Date1996
X선 마스크 제작을 위한 텅스텐 식각

안진호

ConferenceIssue Date1996
Current status of mask development for X-ray lithography at PALC

안진호

ConferenceIssue Date1996
ICP etching of tungsten for X-ray masks

안진호

ConferenceIssue Date1996
Dilatometric 분석에 따른 승온단계에서의W-Ni 활성소결 거동에 관한 연구

김영도

ConferenceIssue Date1997
Anisotropic etching of tungsten with ICPsystem

안진호

ConferenceIssue Date1997
The Effect of Ni on the Sintering Behavior of MoSi2 Powder

김영도

ConferenceIssue Date1997
Dilatometric 분석에 따른 승온단계에서의W-Ni 활성소결 거동에 관한 연구

김영도

ConferenceIssue Date1997
Anisotropic Etching of Tungsten with ICP system

안진호

ConferenceIssue Date1997
Stress and microstructure of WNx bilayerfilms for x-ray masks

안진호

ConferenceIssue Date1997
Low stress WNx bilayer absorber films for x-ray masks

안진호

ConferenceIssue Date1997
Comparison of Removal Efficiency of Cu impurity on Si(100) depending on the cleaning splits of (UV/O3 + HF) and (H2O2 +HF)

전형탁

ConferenceIssue Date1997
The Effects of the H-plasma Cleaning onthe Removal of the Metallic Impurities Contaminated on Si(100)

전형탁

ConferenceIssue Date1997
기판조건에 따른 Co/Zr 이중층을 위한 epitaxial CoSi2 성장 및 특성연구

전형탁

ConferenceIssue Date1997
Si(100)의 얇은 산화막을 통한 CoSi2형성에 관한 연구

전형탁

ConferenceIssue Date1997
X-선 마스크 흡수체로써 텅스텐 나이트라이드의 응력과 미세구조

안진호

ConferenceIssue Date1997
Metallic Impurity Removaland face Roughness on Si Wafer in Wet Chemical Cleaning Process

전형탁

ConferenceIssue Date1997
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