ScholarWorks@Hanyang University: 2. Conference Papers

2. Conference Papers(서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers)4,848

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Collection's Items (Sorted by Submit Date in Descending order): 201 to 220 of 4848

Strain Engineering Effect on HER Activity through EMSI and Electronic Structure Tuning

ConferenceIssue Date2025Place광주 김대중컨벤션센터

In situ impedance analysis of cycling degradation behavior in sulfide based all solid state Li metal batteries

ConferenceIssue Date2025Place서울 코엑스

Machine learning assisted quantitative analysis of microstructure performance correlation in composite cathodes for all solid state batteries

ConferenceIssue Date2025Place서울 코엑스

Stress Optimized Cathode for Advanced All Solid State Batteries via Quantitative Analysis of Microstructure and Resistance

ConferenceIssue Date2025

Evaluation of Mechanical Properties of CVD-HfC coating Depending on Deposition Parameters

ConferenceIssue Date2025Place부산 벡스코

Vapor-Phase Dry Development Enabling High-Resolution and Improved CDU in EUV Photoresists

ConferenceIssue Date2026Place미국

Vapor-Phase Dry Development for High-Resolution Patterning and Improved Uniformity in EUV Resists

ConferenceIssue Date2026Place광주

Functionalization of CNT Surface for Conformal Coating in EUV Pellicle Applications

ConferenceIssue Date2026Place광주

Enhancing Etching and Imaging Performance of Pt-Based EUV Mask Absorbers via Ion Implantation

ConferenceIssue Date2026Place광주

Impact of Annealing on Contact Resistance of Ru/Si1-xGex

ConferenceIssue Date2026Place광주

Resolution Enhancement in EUV Ptychography via Optimized Probe Overlap Ratio for Diffraction Diversity

ConferenceIssue Date2026Place광주

증착 방법에 따른 Poly-Si의 결정립 구조 및 전기적 특성 연구

ConferenceIssue Date2026Place강원도 하이원리조트

이미징 성능 및 Best Focus Shift 완화를 위한 High-NA EUV 마스크용 Bilayer 흡수체 구조 연구

ConferenceIssue Date2026Place강원도 하이원리조트

Grain Size에 따른 EUV 펠리클의 기계적 및 광학적 특성 변화

ConferenceIssue Date2026Place강원도 하이원리조트

Diffraction Diversity 향상을 통한 EUV Ptychography 이미지 복원 성능 개선 연구

ConferenceIssue Date2026Place강원도 하이원리조트

저온전자온도 플라즈마를 이용한 EUV 포토레지스트 건식 현상 공정 기술

ConferenceIssue Date2026Place강원도 하이원리조트

Functionalization of Graphene-Like Surface for Protective ALD Coating in EUV Pellicle Applications

ConferenceIssue Date2025Place일본

Enhancing Etching and Optical Properties of EUV Mask Absorbers via Ion Implantation

ConferenceIssue Date2025Place일본

Reliable actinic mask evaluation via high-frequency signal enhancement in EUV ptychography

ConferenceIssue Date2026Place미국

Resolution enhancement in EUV ptychography via optimized probe overlap ratio for diffraction diversity

ConferenceIssue Date2026Place미국

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