구리 나노입자의 광소결에 의한 기판의 휨 현상 저감 연구A study to reduce the substrate warpage on flash light sintering for copper nanoparticles
- Other Titles
- A study to reduce the substrate warpage on flash light sintering for copper nanoparticles
- Authors
- 유충현; 김학성
- Issue Date
- Nov-2014
- Publisher
- 대한기계학회
- Keywords
- Flash light sintering(광소결); Two-step sintering process(2단계 소결 공정); Warpage(휨); Copper nanoparticles(구리 나노 입자)
- Citation
- 대한기계학회 2014년도 추계학술대회, pp.561 - 565
- Indexed
- OTHER
- Journal Title
- 대한기계학회 2014년도 추계학술대회
- Start Page
- 561
- End Page
- 565
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/25722
- Abstract
- A study to reduce the substrate warpage on flash light sintering for copper nanoparticles was investigated. In order to minimize the substrate warpage, two-step flash light sintering method was performed. The flash light sintering process was divided into a preheating step and a main sintering step. To find the optimum sintering conditions of copper nanoparticles, the flash light conditions (irradiation energy, pulse number, on-time and off-time) was varied. The microstructures and transformation crystal phase of the sintered copper nanofilms were analyzed by scanning electron microscopy. In addition, the sheet resistance was measured using a four-point probe method. Also, the thickness of copper nanofilms was measured by alpha-step. From these results, it is found that the flash light sintered copper nanofilms have a low resistivity without any damage to the thin polyimide substrate.
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