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Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition
- Authors
- 박진성
- Issue Date
- 24-Nov-2017
- Place
- 경기도 수원시 성균관대학교 자연과학캠퍼스
- Conference Name
- 반도체 디스플레이 공정, 장비 및 소재 신기술 동향
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)