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Effect of cylindrical-type antenna turns on the plasma parameters in inductively coupled plasmas
- Authors
- 정진욱
- Issue Date
- 27-Mar-2015
- Place
- Nagoya University, Nagoya, Japan
- Conference Name
- 7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)