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극자외선 노광 공정용 half-tone 위상 변위 마스크 제작 공정 시 absorber stack의 sidewall angle의 영향
- Authors
- 안진호
- Issue Date
- 1-Apr-2015
- Place
- 서울 COEX
- Conference Name
- 제4회 차세대리소그래피학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)