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디스플레이 백플레인용 노광장치에서 해상력 향상을 위한 Rim Type Phase Shift Mask 시뮬레이션 평가
- Authors
- 안진호
- Issue Date
- 25-Oct-2013
- Place
- 광주 김대중컨벤션센터
- Conference Name
- 친환경 전자재료 및 나노기술 학술대회(ENGE2013)
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)