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Bias dependence of PBTI degradation mechanism in metal-oxide semiconductor field effect transistors with La-incorporated hafnium-based dielectric

Authors
최창환
Issue Date
23-Jun-2011
Publisher
CEA-LETI, IMEP
Citation
17th Conference on Insulating Films on Semiconductors (INFOS)
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/54928
Conference Name
17th Conference on Insulating Films on Semiconductors (INFOS)
Place
Grenoble, France
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Choi, Chang hwan
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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