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Metastable number density and stepwise ionization in a low-pressure inductively coupled argon plasma

Authors
정진욱
Issue Date
4-Jul-2010
Publisher
Committee on Asia-Pacific Conference on Plasma Science and Technology
Citation
The 10th Asia Pacific Conference on Plasma Science and Technology and the 23rd Symposium on Plasma S
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/58225
Conference Name
The 10th Asia Pacific Conference on Plasma Science and Technology and the 23rd Symposium on Plasma S
Place
Jeju, Korea
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서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers

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