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A self-consistent model of collisionless oscillating sheaths for ion energy simulation in various types of dual frequency capacitively coupled plasma
- Authors
- 정진욱
- Issue Date
- 4-Jul-2010
- Publisher
- Committee on Asia-Pacific Conference on Plasma Science and Technology
- Citation
- The 10th Asia Pacific Conference on Plasma Science and Technology and the 23rd Symposium on Plasma S
- Conference Name
- The 10th Asia Pacific Conference on Plasma Science and Technology and the 23rd Symposium on Plasma S
- Place
- Jeju, Korea
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)