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광학적/열적 특성 평가를 통한 ZrSi2 기반 펠리클 적용 가능성 검증
- Authors
- 안진호
- Issue Date
- 20210520
- Place
- 온라인 개최
- Conference Name
- 2021 한국반도체디스플레이기술학회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)