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플라즈마에서 삼중 주파수를 이용한 밀리미터 두께의 유전체 두께 실시간 측정법 개발

Authors
정진욱
Issue Date
4-Feb-2021
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/6250
Place
온라인
Conference Name
제 60회 한국진공학회 동계정기학술대회
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서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers

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Chung, Chin Wook
COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)
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