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Small size Si precursor inhibitors for area-selective atomic layer deposition
- Authors
- Ko, Byeong Guk; Khan, Mohammad Rizwan; Lee, Jae Kwang; Shong, Bonggeun; Kim, Woo-Hee; Lee, Han-Bo-Ram
- Issue Date
- 19-Aug-2018
- Publisher
- AMER CHEMICAL SOC
- Citation
- ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, v.256
- Journal Title
- ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
- Volume
- 256
- ISSN
- 0065-7727
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- There are no files associated with this item.
- Appears in
Collections - College of Engineering > Chemical Engineering Major > 1. Journal Articles
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Related Researcher
- Shong, Bong geun
- Engineering (Chemical Engineering)