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Low-temperature direct synthesis of high quality WS <inf>2</inf> thin films by plasma-enhanced atomic layer deposition for energy related applications
- Authors
- Yeo; S.; Nandi; D.K.; Rahul; R.; Kim; T.H.; Shong, Bonggeun; B.; Jang; Y.; Bae; J.-S.; Han; J.W.; Kim; S.-H.; Kim; H.
- Issue Date
- 2018
- Citation
- Applied Surface Science, v.459, pp.596 - 605
- Journal Title
- Applied Surface Science
- Volume
- 459
- Start Page
- 596
- End Page
- 605
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Collections - College of Engineering > Chemical Engineering Major > 1. Journal Articles
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Related Researcher
- Shong, Bong geun
- Engineering (Chemical Engineering)