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Results 1-10 of 19 (Search time: 0.017 seconds).
Plasmonic computational lithography for below 10-nm patterning
Kim, Sang-kon
Article
Issue Date
2020
Citation
Proceedings of SPIE - The International Society for Optical Engineering, v.11462
Publisher
SPIE
Line‐edge roughness from extreme ultraviolet lithography to fin‐field‐effect‐transistor: Computational study
Kim, S.-K.
Article
Issue Date
2021
Citation
Micromachines, v.12, no.12
Publisher
MDPI
Aerial image formation of quantum lithography for diffraction limit
Kim, Sang-Kon
Article
Issue Date
2012
Citation
CURRENT APPLIED PHYSICS, v.12, no.6, pp.1566 - 1574
Publisher
ELSEVIER
Effect of Computational Lithography Parameters on the Organic Light-Emitting Diodes
Kim, Sang-Kon
Article
Issue Date
2016
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.16, no.8, pp.8496 - 8499
Publisher
AMER SCIENTIFIC PUBLISHERS
Impact of Process Parameters on a Combining Process of Block-Copolymer Self-Assembly with Electrohydrodynamic Jet Printing
Kim, Sang-Kon
Article
Issue Date
2017
Citation
SCIENCE OF ADVANCED MATERIALS, v.9, no.1, pp.42 - 47
Publisher
AMER SCIENTIFIC PUBLISHERS
Computational Study of Electrohydrodynamic Jet Printing with Block-Copolymer Inks
Kim, Sang-Kon
Article
Issue Date
2017
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.17, no.8, pp.5432 - 5435
Publisher
AMER SCIENTIFIC PUBLISHERS
Modeling and Simulation of Line Edge Roughness for EUV Resists
김상곤
Article
Issue Date
2014
Citation
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, v.14, no.1, pp.61 - 69
Publisher
대한전자공학회
Contact Hole Shrinking of Directed Self-Assembly and Its Application Based on Simulation Approach
Kim, Sang-Kon
Article
Issue Date
2015
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.15, no.10, pp.8183 - 8186
Publisher
AMER SCIENTIFIC PUBLISHERS
Impact of process parameters on pattern formation in the maskless plasmonic computational lithography
Kim, Sang-Kon
Article
Issue Date
2015
Citation
CURRENT APPLIED PHYSICS, v.15, no.6, pp.698 - 702
Publisher
ELSEVIER SCIENCE BV
Impact of Plasmonic Parameters on 7-nm Patterning in Plasmonic Computational Lithography
Kim, Sang-Kon
Article
Issue Date
2018
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.18, no.10, pp.7124 - 7127
Publisher
AMER SCIENTIFIC PUBLISHERS
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4
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3
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3
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3
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