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Results 1-10 of 12 (Search time: 0.005 seconds).
Computational Study of Extreme Ultraviolet Vote-Taking Lithography for Defect Repair
Kim, Sang-Kon
Article
Issue Date
2020
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.20, no.8, pp.4994 - 4997
Publisher
AMER SCIENTIFIC PUBLISHERS
Line-Edge Roughness Stochastics for 5-nm Pattern Formation in the Extreme Ultraviolet Lithography
Kim, Sang-Kon
Article
Issue Date
2019
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.19, no.8, pp.4657 - 4660
Publisher
AMER SCIENTIFIC PUBLISHERS
Line-Edge Roughness on Fin-Field-Effect-Transistor Performance for 7-nm and 5-nm Patterns
Kim, Sang-Kon
Article
Issue Date
2020
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.20, no.11, pp.6912 - 6915
Publisher
AMER SCIENTIFIC PUBLISHERS
Effects of Line-Edge Roughness on Extreme Ultraviolet Lithography CDs and Fin-Field-Effect-Transistor Performance for Below 10-nm Patterns
Kim, Sang-Kon
Article
Issue Date
2017
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.17, no.11, pp.8338 - 8343
Publisher
AMER SCIENTIFIC PUBLISHERS
A Molecular View of Block Copolymer Directed Assembly with Solvent Vapors Simulation
Kim, Sang-Kon
Article
Issue Date
2017
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.17, no.11, pp.8369 - 8371
Publisher
AMER SCIENTIFIC PUBLISHERS
Computational Study of Electrohydrodynamic Jet Printing with Block-Copolymer Inks
Kim, Sang-Kon
Article
Issue Date
2017
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.17, no.8, pp.5432 - 5435
Publisher
AMER SCIENTIFIC PUBLISHERS
Impact of Plasmonic Parameters on 7-nm Patterning in Plasmonic Computational Lithography
Kim, Sang-Kon
Article
Issue Date
2018
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.18, no.10, pp.7124 - 7127
Publisher
AMER SCIENTIFIC PUBLISHERS
Effect of Computational Lithography Parameters on the Organic Light-Emitting Diodes
Kim, Sang-Kon
Article
Issue Date
2016
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.16, no.8, pp.8496 - 8499
Publisher
AMER SCIENTIFIC PUBLISHERS
Prediction of Electric Field Effects on Defect-Free Self-Assembled Nano-Patterning of Block Copolymer
Kim, Sang-Kon
Article
Issue Date
2016
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.16, no.3, pp.2706 - 2709
Publisher
AMER SCIENTIFIC PUBLISHERS
Extreme Ultraviolet Multilayer Defect Compensation in Computational Lithography
Kim, Sang-Kon
Article
Issue Date
2016
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.16, no.5, pp.5415 - 5419
Publisher
AMER SCIENTIFIC PUBLISHERS
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kim, sang-kon
11
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1
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11
Lithography
9
EUV
4
Block Copolymer
3
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3
LER
3
Line Edge Roughness
3
FinFET
2
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2
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