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Effects of Sensor Platform Scaling on Signal-to-Noise Ratio in the Resistor-and Horizontal Floating-Gate FET-Type Gas Sensors
- Authors
- Shin, Wonjun; Koo, Ryun-Han; Hong, Seongbin; Jung, Gyuweon; Jeong, Yujeong; Lee, Sung-Tae; Lee, Jong-Ho
- Issue Date
- Nov-2023
- Publisher
- Institute of Electrical and Electronics Engineers Inc.
- Keywords
- Indium–gallium–zinc oxide (IGZO); low-frequency noise (LFN); nitrogen dioxide (NO<inline-formula xmlns:ali=http://www.niso.org/schemas/ali/1.0/ xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink xmlns:xsi=http://www.w3.org/2001/XMLSchema-instance> <tex-math notation=LaTeX>$_{\text{2}}$</tex-math> </inline-formula>); scaling; signal-to-noise ratio (SNR)
- Citation
- IEEE Transactions on Electron Devices, v.70, no.11, pp 1 - 6
- Pages
- 6
- Journal Title
- IEEE Transactions on Electron Devices
- Volume
- 70
- Number
- 11
- Start Page
- 1
- End Page
- 6
- ISSN
- 0018-9383
1557-9646
- Abstract
- We investigate the effects of sensor platform scaling on signal-to-noise-ratio (SNR) in the resistor-and field-effect-transistor (FET)-type gas sensors with horizontal floating gate (FG). Indium–gallium–zinc oxide (IGZO) is used as a sensing material and deposited by the RF sputtering method. The low-frequency noise (LFN) characteristics of the resistor-and FET-type gas sensors are determined by the sensing material and FET transducer, respectively. In both resistor-and FET-type gas sensors, the SNR decreases with the scaling of the sensing area. However, the reason for a decrease in the SNR differs depending on the sensor platform. The decrease in SNR in a resistor-type gas sensor is due to an increase in intrinsic device noise and gas-to-air-noise ratio (GANR), whereas a decrease in SNR in an FET-type gas sensor is due to a decrease in response. The results provide important design guidelines in designing and fabricating the resistor-and FET-type gas sensors. IEEE
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Related Researcher
- Lee, Sung-Tae
- Engineering (Electronic & Electrical Engineering)