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Ka-Band MMIC Using AlGaN/GaN-on-Si With Recessed High-k Dual MIS Structure

Authors
Kim, Dong-HwanPark, HongjongEom, Su-KeunJeong, Jun-SeokCha, Ho-YoungSeo, Kwang-Seok
Issue Date
Jul-2018
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Keywords
AlGaN/GaN-on-Si; gate recess; dual MIS; high-k; MMIC; power amplifier; Ka-band
Citation
IEEE ELECTRON DEVICE LETTERS, v.39, no.7, pp.995 - 998
Journal Title
IEEE ELECTRON DEVICE LETTERS
Volume
39
Number
7
Start Page
995
End Page
998
URI
https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/3475
DOI
10.1109/LED.2018.2834223
ISSN
0741-3106
Abstract
This letter reports the excellent radio frequency output characteristics of AlGaN/GaN-on-Si power amplifier (PA) monolithic microwave integrated circuits (MMICs) operating at the Ka-band, employing a recessed metal-insulator-semiconductor (MIS) structure with SiNx/HfON dual dielectric layers. The fabricated 0.15-mu m AlGaN/GaN-on-Si high electron-mobility transistor (HEMT) exhibited a low OFF-state current and reduced current collapse in comparison with the conventional Schottky gate HEMT; therefore, an enhanced output power of the PA MMIC is achieved. The fabricated two-stage PA MMIC exhibited a continuous-wave output power of >29 dBm with a power-added efficiency (PAE) of 14.5% at the drain voltage of 20 V, at 26.5 GHz.
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