Normally-Off GaN-on-Si MISFET Using PECVD SiON Gate Dielectric
- Authors
- Kim, Hyun-Seop; Han, Sang-Woo; Jang, Won-Ho; Cho, Chun-Hyung; Seo, Kwang-Seok; Oh, Jungwoo; Cha, Ho-Young
- Issue Date
- Aug-2017
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- Keywords
- Gallium nitride (GaN); normally-off; plasma enhanced chemical vapor deposition (PECVD); silicon oxynitride (SiON)
- Citation
- IEEE ELECTRON DEVICE LETTERS, v.38, no.8, pp.1090 - 1093
- Journal Title
- IEEE ELECTRON DEVICE LETTERS
- Volume
- 38
- Number
- 8
- Start Page
- 1090
- End Page
- 1093
- URI
- https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/5442
- DOI
- 10.1109/LED.2017.2720719
- ISSN
- 0741-3106
- Abstract
- We have developed a silicon oxynitride (SiON) deposition process using a plasma-enhanced chemical vapor deposition system for the gate dielectric of GaN-on-Si metal-insulator-semiconductor field-effect transistors (MISFETs). The optimized SiON film had a relative dielectric constant of 5.3 and a breakdown field of 12MV/cm. A normally-off GaN-on-Si MISFET fabricated with a 33-nm SiON gate dielectric exhibited a threshold voltage of similar to 2 V, an ON-resistance of 7.85 m Omega.cm(2), and a breakdown voltage of similar to 640 V at the OFF-state current density of 1 mu A/mm. The extracted interface trap density was 1x10(12) cm(-2) . eV(-1) at E-c - Et = 0.442 eV, which resulted in negligible hysteresis and excellent dynamic characteristics.
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- Appears in
Collections - College of Engineering > School of Electronic & Electrical Engineering > 1. Journal Articles
- College of Science and Technology > Department of Electronic and Electrical Engineering > 1. Journal Articles
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