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Formation of oxygen vacancy at surfaces of ZnO by trimethylaluminum open access

Eom, Hyobin; Bae, Woojin; Sung, Ju Young; Choi, Ji Hyeon; Dae, Kyun Seong; Jang, Jae Hyuck; Park, Tae Joo; Lee, Sang Woon; Shong, Bonggeun

ArticleIssue Date2024CitationAPL MATERIALS, v.12, no.3PublisherAIP Publishing

Comparative Study on Indium Precursors for Plasma-Enhanced Atomic Layer Deposition of In<sub>2</sub>O<sub>3</sub> and Application to High-Performance Field-Effect Transistors

Lee, Ho Young; Hur, Jae Seok; Cho, Iaan; Choi, Cheol Hee; Yoon, Seong Hun; Kwon, Yongwoo; Shong, Bonggeun; Jeong, Jae Kyeong

ArticleIssue Date2023CitationACS APPLIED MATERIALS & INTERFACES, v.15, no.44, pp 51399 - 51410PublisherAMER CHEMICAL SOC

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