Cho, Wontae; Jang, Hong Suk; An, Ki-Seok; Lee, Young Kuk; Chung, Taek-Mo; Kim, Chang Gyoun; Kim, Yunsoo; So, Byung-Soo; Hwang, Jin-Ha; Jung, Donggeun
ArticleIssue Date2006CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.24, no.4, pp.1208 - 1212PublisherA V S AMER INST PHYSICS