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Wet Etching시 Ultrasonic의 주파수가 실리콘 웨이퍼 표면형상에 미치는 영향
- Authors
- Roh, Jae Seung
- Issue Date
- 23-May-2013
- Publisher
- 한국재료학회
- Citation
- 2013년도 한국재료학회 춘계학술발표대회 및 제 24회 신소재 심포지엄, v.2013, no.1, pp.148
- Conference Name
- 2013년도 한국재료학회 춘계학술발표대회 및 제 24회 신소재 심포지엄
- Place
- KO
여수 엠블호텔
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Related Researcher
- Roh, Jae Seung
- College of Engineering (Department of Materials Science and Engineering)