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Si-wafer wet etching 시 etching time, etching temperature, 불산 및 질산 농도가 etching rate에 미치는 영향
- Authors
- Roh, Jae Seung
- Issue Date
- 8-Nov-2012
- Publisher
- 한국재료학회
- Citation
- 2012년 한국재료학회 추계학술대회, v.2, no.2, pp.p-8
- Conference Name
- 2012년 한국재료학회 추계학술대회
- Place
- 리카이샌드파인리조트(강릉)
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Collections - Department of Materials Science and Engineering > 2. Conference Papers
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Related Researcher
- Roh, Jae Seung
- College of Engineering (Department of Materials Science and Engineering)