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Si-wafer의 wet etching시 표면특성변화에 미치는 etching 속도의 영향
- Authors
- Roh, Jae Seung
- Issue Date
- 17-May-2012
- Publisher
- 한국재료학회
- Citation
- 2012년 한국재료학회 춘계학술대회, v.1, no.1, pp.p-10
- Conference Name
- 2012년 한국재료학회 춘계학술대회
- Place
- 무주 덕유산 리조트
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Collections - Department of Materials Science and Engineering > 2. Conference Papers
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Related Researcher
- Roh, Jae Seung
- College of Engineering (Department of Materials Science and Engineering)