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A passive reaction force compensation (RFC) mechanism for a linear motor motion stage
- Authors
- You, Yo-han; Ahn, Hyeong-Joon
- Issue Date
- May-2014
- Publisher
- KOREAN SOC PRECISION ENG
- Keywords
- Reaction force compensation; Eddy current damper; Linear motion stage
- Citation
- INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.15, no.5, pp.797 - 801
- Volume
- 15
- Number
- 5
- Start Page
- 797
- End Page
- 801
- ISSN
- 2234-7593
- Abstract
- Vibration of the system base due to reaction force of rapid acceleration or deceleration motion of a stage is one of main causes for reducing life and productivity of the manufacturing equipment. This paper presents a passive RFC (reaction force compensation) mechanism for a linear motor motion stage. A systematic design process of the RFC system is developed based on a simple mathematical model of the RFC system. In addition, two ways are introduced to reduce the resonance vibration of the magnet track. Finally, a XY linear motion stage with the RFC mechanism is built, and the performance of the system is verified experimentally: In case of acceleration and deceleration of 10 m/s(2), around 60% of residual vibration of the system base is reduced with the RFC mechanism.
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Related Researcher
- Ahn, Hyeong Joon
- College of Engineering (School of Mechanical Engineering)