MICRO GROOVING AND SURFACE POLISHING ON QUARTZ
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김보현 | - |
dc.date.available | 2018-06-12T07:59:04Z | - |
dc.date.created | 2018-06-11 | - |
dc.date.issued | 2016-12 | - |
dc.identifier.uri | http://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/23484 | - |
dc.publisher | The Japan Society of Mechanical Engineers (JSME) | - |
dc.relation.isPartOf | International Symposium on Micro-Nano Science and Technology 2016 | - |
dc.title | MICRO GROOVING AND SURFACE POLISHING ON QUARTZ | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.identifier.bibliographicCitation | International Symposium on Micro-Nano Science and Technology 2016, pp.79 - 79 | - |
dc.description.journalClass | 1 | - |
dc.citation.conferenceDate | 2016-12 | - |
dc.citation.conferencePlace | JP | - |
dc.citation.conferencePlace | 일본 도쿄 | - |
dc.citation.endPage | 79 | - |
dc.citation.startPage | 79 | - |
dc.citation.title | International Symposium on Micro-Nano Science and Technology 2016 | - |
dc.contributor.affiliatedAuthor | 김보현 | - |
dc.type.docType | Article; Proceedings Paper | - |
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