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MICRO GROOVING AND SURFACE POLISHING ON QUARTZ

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dc.contributor.author김보현-
dc.date.available2018-06-12T07:59:04Z-
dc.date.created2018-06-11-
dc.date.issued2016-12-
dc.identifier.urihttp://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/23484-
dc.publisherThe Japan Society of Mechanical Engineers (JSME)-
dc.relation.isPartOfInternational Symposium on Micro-Nano Science and Technology 2016-
dc.titleMICRO GROOVING AND SURFACE POLISHING ON QUARTZ-
dc.typeConference-
dc.type.rimsCONF-
dc.identifier.bibliographicCitationInternational Symposium on Micro-Nano Science and Technology 2016, pp.79 - 79-
dc.description.journalClass1-
dc.citation.conferenceDate2016-12-
dc.citation.conferencePlaceJP-
dc.citation.conferencePlace일본 도쿄-
dc.citation.endPage79-
dc.citation.startPage79-
dc.citation.titleInternational Symposium on Micro-Nano Science and Technology 2016-
dc.contributor.affiliatedAuthor김보현-
dc.type.docTypeArticle; Proceedings Paper-
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