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MICRO GROOVING AND SURFACE POLISHING ON QUARTZ

Authors
김보현
Issue Date
Dec-2016
Publisher
The Japan Society of Mechanical Engineers (JSME)
Citation
International Symposium on Micro-Nano Science and Technology 2016, pp.79 - 79
URI
http://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/23484
Conference Name
International Symposium on Micro-Nano Science and Technology 2016
Place
JP
일본 도쿄
Conference Date
2016-12
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