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베이스 동특성을 고려한 XY 선형 모션 스테이지 시스템 반발력 보상 기구의 동특성 해석
- Authors
- 안형준
- Issue Date
- May-2011
- Publisher
- 대한기계학회
- Citation
- 2011 대한기계학회 동역학 및 제어부문 춘계학술대회 논문집
- Conference Name
- 2011 대한기계학회 동역학 및 제어부문 춘계학술대회 논문집
- Place
- KO
부산
- Conference Date
- 2011-05
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Collections - College of Engineering > Department of Mechanical Engineering > 2. Conference Papers
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Related Researcher
- Ahn, Hyeong Joon
- College of Engineering (School of Mechanical Engineering)