Micro-structuring of glass with features less than 100 mu m by electrochemical discharge machining
- Authors
- 김보현; X. D. CAO; C. N. CHU
- Issue Date
- 2009
- Publisher
- ELSEVIER SCIENCE INC
- Citation
- PRECIS ENG, v.33, no.4, pp.459 - 465
- Journal Title
- PRECIS ENG
- Volume
- 33
- Number
- 4
- Start Page
- 459
- End Page
- 465
- URI
- http://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/6041
- DOI
- 10.1016/j.precisioneng.2009.01.001
- ISSN
- 0141-6359
- Abstract
- Micro-electrochemical discharge machining (ECDM) was studied in order to improve the machining of 3D micro-structures of glass. To minimize structures and obtain good surface microstructures, the effects of the electrolyte, the pulse on/off-time ratio, the voltage, the feedrate, the rotational speed, and the electrolyte concentration in the drilling and milling processes were studied. In ECDM, voltage is applied to generate a gas film and sparks on a tool electrode; however, high voltage produces poor machining resolution. To obtain a stable gas film over the whole surface of the tool at a low voltage, a new mechanical contact detector, based on a loadcell, was used; the immersion depth of the tool electrode in the electrolyte was reduced as much as possible. In this study, various micro-structures less than 100 mu m in size, such as circle divide 60 mu m micro-holes, a 10 mu m-thin wall, and a 3D micro-structure were fabricated to demonstrate the potential for micro-machining of glass by ECDM. (C) 2009 Elsevier Inc. All rights reserved.
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