Experimental Investigation of ECDM for Fabricating Micro Structures of Quartz

Abstract

Recently, the utilization of electrochemical discharge machining (ECDM) has proved to have potential for enhancing the machining efficiency and accuracy of micro-drilling and milling for glass. However, there is a lack of information about the machining conditions for milling in quartz materials, which have different characteristics than glass. In ECDM, gas film and sparks are generated on a tool when voltage is applied between the tool and a counter electrode. Workpiece materials are removed mainly by the heat of the sparks. The spark generation is affected by both the voltage and electrolyte conditions. This study investigated the ECDM characteristics according to machining parameters, such as electrolyte level, electrolyte concentration, pulse voltage, offset pulse voltage, pulse on-time, pulse off-time, and tool feedrate. Surface roughness and sharpness of the rims and edges were observed under different machining conditions. Based on the investigation of the machining conditions, micro structures, including micro grooves and columns, were machined on quartz material.