Current-Voltage Model of Bulk Fin Field-Effect Transistors with a Half-Circle Corner

Abstract

The drain current of fully depleted (FD) nanoscale bulk FinFETs with the top-channel of a half-circle shape was modeled, for the first time, systematically in all operational regions and compared with the data obtained from three-dimensional (3D) device simulation. In the current model of these devices, it is very important to have accurate threshold voltages for side-channels and top-channel, and take the field penetration effect induced by the top-gate near the top of a fin body into account the threshold voltage (Vth) models for top-channels and side-channels, respectively. So, we obtained successfully the Vth models [Vth(0,t) (Vth model of top-channel at a low drain bias) and Vth(0,s) (Vth model of side-channels at a low drain bias)] considering the field penetration effect for both channels (top-and side-channels) to model the current behaviors in the doped bulk FinFETs with the top-channel of a half-circle shape. Our compact current model with Vth(0,t) and Vth(0,s) predicted accurately the current behaviors of the devices and shown a good agreement with 3D simulation. (C) 2013 The Japan Society of Applied Physics