High-Quality Solution-Processed Metal-Oxide Gate Dielectrics Realized With a Photo-Activated Metal Oxide Nanocluster Precursor
- Authors
- Jo, Jeong-Wan; Kim, Kyung-Tae; Facchetti, Antonio; Kim, Myung-Gil; Park, Sung Kyu
- Issue Date
- Nov-2018
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- Keywords
- Aluminum oxide; a-Al2O3; nanocluster; photochemical activation; solution process
- Citation
- IEEE ELECTRON DEVICE LETTERS, v.39, no.11, pp 1668 - 1671
- Pages
- 4
- Journal Title
- IEEE ELECTRON DEVICE LETTERS
- Volume
- 39
- Number
- 11
- Start Page
- 1668
- End Page
- 1671
- URI
- https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/607
- DOI
- 10.1109/LED.2018.2870424
- ISSN
- 0741-3106
1558-0563
- Abstract
- High quality solution-derived amorphous alumina (a-Al2O3) dielectric has been achieved with [Al-13(mu(3)-OH)(6)(mu-OH)(18)(H2O)(24)](NO3)(15) (Al-13 nanocluster) as a precursor and a local structure-controllable activation process via deep-UV-induced photochemical activation. The synergetic combination of an Al-13 nanocluster precursor and high-energetic photochemical activation enables the formation of highly dense a-Al2O3 thin films via an efficient dissociation and rearrangement of the nanocluster skeleton. The electrical characteristics of the nanocluster-based a-Al2O3 thin films were investigated in terms of their operative electronic conduction mechanism by comparing conventional nitrate-based and vacuum-deposited films. From these results, it was found that the leakage current density of solution-processed a-Al2O3 layers is largely affected by their precursor structures. Finally, to demonstrate the versatility of the high-quality nanocluster-based a-Al2O3 dielectrics, carbon nanotube and metal-oxide thin-film transistors were fabricated on low thermal budget stretchable and rigid substrates, respectively.
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Collections - College of ICT Engineering > School of Electrical and Electronics Engineering > 1. Journal Articles
- College of Natural Sciences > Department of Chemistry > 1. Journal Articles
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