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Reversible nonvolatile and threshold switching characteristics in Cu/high-k/Si devicesopen access

Authors
Mahata, ChandreswarKim, WonwooKim, ShiwhanIsmail, MuhammadKim, Min-HwiKim, SungjunPark, Byung-Gook
Issue Date
Aug-2019
Publisher
IEICE-INST ELECTRONICS INFORMATION COMMUNICATIONS ENG
Keywords
resistive switching; atomic layer deposition; CBRAM; copper; high-k dielectric
Citation
IEICE ELECTRONICS EXPRESS, v.16, no.16
Journal Title
IEICE ELECTRONICS EXPRESS
Volume
16
Number
16
URI
https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/72120
DOI
10.1587/elex.16.20190404
ISSN
1349-2543
Abstract
Here, the resistive switching properties of Cu/Al2O3/p-Si and Cu/HfO2/p-Si devices are investigated in details. Both memory switching and threshold switching behaviors observed under different current compliance conditions. The transition between two switching modes is possible. Cu ion diffusion form conductive filaments inside the insulator and formation/dissociation mechanism induced the switching phenomenon. The device performances under both memory switching and threshold switching are possible for non-volatile storage memory and selector applications, respectively.
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창의ICT공과대학 (전자전기공학부)
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