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The use of inductively coupled CF4/Ar plasma to improve the etch rate of ZrO2 thin films

Kim, H.-S.; Woo, J.-C.; Joo, Y.-H.; Kim, C.-I.

ArticleIssue Date2013CitationTransactions on Electrical and Electronic Materials, v.14, no.1, pp 12 - 15Publisher한국전기전자재료학회

The dry etching of tin thin films using inductively coupled CF4/Ar Plasma

Woo, J.-C.; Choi, C.-A.; Joo, Y.-H.; Kim, H.-S.; Kim, C.-I.

ArticleIssue Date2013CitationTransactions on Electrical and Electronic Materials, v.14, no.2, pp 67 - 70Publisher한국전기전자재료학회

BCl3/Ar 유도 결합 플라즈마를 이용한 ZnO 박막의 식각 특성

우종창; 김관하; 김경태; 김종규; 강찬민; 김창일

ArticleIssue Date2007Citation전기학회논문지ABCD, v.56, no.3, pp 566 - 570Publisher대한전기학회

Etch characteristics of HfO2 thin films by using CF4/Ar inductively coupled plasma

Kang, Pil-Seung; Woo, Jong-Chang; Joo, Young-Hee; Kim, Chang-Il

ArticleIssue Date2013CitationVACUUM, v.93, pp 50 - 55PublisherPERGAMON-ELSEVIER SCIENCE LTD

유도 결합 플라즈마를 이용한 TiN 박막의 식각 특성

엄두승; 강창민; 양설; 김동표; 김창일

ArticleIssue Date2008Citation한국표면공학회지, v.41, no.3, pp 83 - 87Publisher한국표면공학회

Surface Etching of TiO2 Thin Films Using High Density Cl-2/Ar Plasma

Woo, Jong-Chang; Joo, Young-Hee; Kim, Chang-Il

ArticleIssue Date2015CitationTRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS, v.16, no.6, pp 346 - 350PublisherKOREAN INST ELECTRICAL & ELECTRONIC MATERIAL ENGINEERS

The Etching Properties of SBT Thin Films in BC3/Cl 2/Ar Plasma

Yeo, J.-W.; Kim, D.-P.; Kim, C.-I.

ArticleIssue Date2003CitationIEEE International Conference on Plasma Science, pp 402

Inductively Coupled Plasma Etching of (Pb,Sr)TiO3 Thin Film in a Cl2/Ar Plasma

Kim, G.H.; Kim, D.P.; Kim, K.T.; Kim, C.I.

ArticleIssue Date2003CitationIEEE International Conference on Plasma Science, pp 402

Effects of Temperature on the Etching Properties of Bi 4-xLaxTi3O12 Thin Films

Kim, D.P.; Kim, K.T.; Kim, C.I.

ArticleIssue Date2003CitationIEEE International Conference on Plasma Science, pp 131

Dry etching characteristics of indium zinc oxide thin films in adaptive coupled plasma

Woo, J.-C.; Choi, C.-A.; Kim, C.-I.

ArticleIssue Date2013CitationTransactions on Electrical and Electronic Materials, v.14, no.4, pp 216 - 220Publisher한국전기전자재료학회

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