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Acoustic cavitation behavior in isopropyl alcohol added cleaning solutionGo to Link

Kang, Bong Kyun; Jeong, Ji hyun; Kim, Min su; Sohn, Hong Seong; Busnaina, Ahmed.A.; Park, Jin-Goo

ArticleIssue Date2013CitationSolid State Phenomena, v.195, pp 169 - 172PublisherScitec Publications Ltd.
SCIESCOPUS
Evaluation of very dilute alkaline solutions for wafer cleaning with megasonic irradiationGo to Link

Jeong, Ji hyun; Kang, Bong Kyun; Kim, Min su; Sohn, Hong Seong; Busnaina, Ahmed.A.; Park, Jin-Goo

ArticleIssue Date2013CitationSolid State Phenomena, v.195, pp 181 - 184PublisherScitec Publications Ltd.
SCIESCOPUS
Optimization of DIO 3with megasonic cleaning of Ru capped EUVL mask for effective carbon contaminant removalGo to Link

Lee, Seung Ho; Kang, Bong Kyun; Kim, Min su; Lim, Jungsoo; Jeong, Ji hyun; Park, Jin-Goo

ArticleIssue Date2011CitationECS Transactions, v.41, no.5, pp 131 - 138PublisherElectrochemical Society, Inc.
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