Browsing by Kang, Na-GyeongAuthor
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Effect of the H2/N2 Ratio on Molybdenum Nitride Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition: Applications for Next-Generation InterconnectsGo to Link
Ha, Min-Ji; Kang, Na-Gyeong; Chung, Eun-Su; Ahn, Ji-Hoon
ArticleIssue Date2025CitationACS APPLIED NANO MATERIALS, v.8, no.25, pp 13130 - 13138PublisherAMER CHEMICAL SOC
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https://pubs.aip.org/avs/jva/article/42/4/042401/3299373/Low-resistivity-molybdenum-carbide-thin-filmsGo to Link
Ha, Min-Ji; Kang, Na-Gyeong; Kim, Woo-Hee; Park,Tae Joo; Park, Tae-Eon; Ahn, Ji-Hoon
ArticleIssue Date2024CitationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, v.42, no.4, pp 1 - 8PublisherAVS Science and Technology Society
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Ultrathin Metal Films with Low Resistivity via Atomic Layer Deposition: Process Pressure Effect on Initial Growth Behavior of Ru FilmsGo to Link
Kang, Na-Gyeong; Ha, Min-Ji; Ahn, Ji-Hoon
ArticleIssue Date2024CitationChemistry of Materials, v.36, no.17, pp 8496 - 8503PublisherAmerican Chemical Society
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